Product Description

PECVD system technique is to make the traditional chemical vapour deposition (CVD) reaction temperature is reduced, most ordinary CVD equipment temperature at 900 ℃ or so, and, in the front of the ordinary CVD device to join the RF radio frequency induction device reaction gas ionization, plasma formation, the activity of plasma is used to promote the reaction, can make chemical vapor deposition temperature down to about 400 ℃, so the system known as the enhanced chemical vapor deposition (PECVD) technique of the system.

	Technical Parameters			Furnace Parts
1	Chamber model	Open slidable chamber	2	Display model	7 "touch screen
3	Max temperature	1200℃	4	Working temperature	≤1150℃
5	Heating rate	Suggess:10℃/Min Max：30℃/Min	6	Chamber move	Yes,speed is adjustable
7	Heating zone length	200mm	8	Tube size	60*1150 mm
9	Temperature accuracy	±1℃	10	Sealing way	Rapid flange seal
11	Temperature curve	30 segments programmable	12	Persisting curve	15 curve
13	over heat alarm	have	14	overcurrent protection	have
15	Thermocouple Failure Protection	have	16	Temperature measure element	K-type thermocouple
17	Hearth Material	Imported alumina fiber	18	Overall dimensions	15006001000MM
	Technical Parameters			RF power
1.	Signal frequency	13.56 MHz±0.005%	2.	outout	5W-300W
3	Power stability	±0.1%	4	efficiency	>=70%
5	Power factor	>=90%	6	Cooling way	Forced air cooling
	Technical Parameters			Vacuum part
1	power	500W	2	Extraction rate	2L\s
3	Ultimate vacuum	4*10-2 Pa
	Technical Parameters			Pneumatic system
1	1 ~ 3 road mass flowmeter is optional		2	accuracy：±1.5%
3	Repeat accuracy：±0.2%		4.	Operating differential pressure range：0.1～0.5 MPa
	The whole machine system characteristics
1	Positive pressure measurement	-100Kpa---100Kpa	2	Vacuum measurement	10-2 Pa ～100Kpa（Support Ar measurement)
3	Positive pressure protection	support	4	Pressure constant	support
5	Intelligent gas path	support	6	Gas circuit timing	support
7	RF working time setting	support	8	Movement speed adjustment	support
9	highest vacuum	4.8×10-3 Pa	10	Software functions	1: rf power open time, can be set, time to stop automatically after the radio frequency power supply.
2: automatic gas switch function, different temperature in different gases, or according to your requirements (optional) 3: automatic detection of vacuum degree, according to the size of the vacuum degree, automatic startup radio frequency power supply. 4: vacuum pump automatic start, according to the degree of vacuum, the system automatically determine whether need to start the vacuum pump. 5. The overpressure protection. 6: other functions according to your requirements
FOB 18000 /USD
Choose a different RF power, vacuum requirements, the number of air and software functions are not the same price，

Main Features

1、In-line vacuum automatic balance-----The tube vacuum real-time monitoring, automatic balance.PECVD process requirement quartz tube vacuum technique is usually between 0.1 ~ 100 pa, the type of PECVD of AIO technique will stop automatically by the vacuum pump control system of tube vacuum degree, set by the user to maintain the uniformity of film forming effect of the best.
2、AIO heating control-----plasma radio frequency control, control system, gas flow control, vacuum system control has focused on a 7-inch touch screen for centralized regulation and control, coordination control - ChengYi AIO control system;
3、The intelligent gas path fault ----- each gas can timing on and off, free switch, save time and effort;
4、The timing control-----set in advance good power of the rf power and the size of the open and close time, automatically run;
5、The chamber movement speed is adjustable-----according to the experimental requirements, the user can set furnace about moving speed can be distance, at the end of the sedimentation chamber of a stove or furnace can be automatically removed sedimentary area and make samples fast cooling;
6、The whole machine structure integration-----overall length is only 1.5 meters, mobile convenience, avoid scattered assembly.Detailed Images

Machine Parts

Name: Tube furnace

Brand: Chengyi

Original: China

The latest models PECVD for ChengYi technique, combining the most domestic manufacturers of tubular PECVD system technique,

Main Features

the advantages of touch screen on a key control, the experiments prove that this structure sedimentation speed, film quality is good, pinhole is less, not easy to crack

Machine Parts

And the control part adopts ChengYi independent research and development of the experimental furnace AIO automatic intelligent control system

Main Features

make the operation more convenient, more powerful.

Certifications

Our Service

Pre-Sales Service

* Inquiry and consulting support.

* Sample testing support.

* View our Factory.

After-Sales Service

* Training how to instal the machine, training how to use the machine.

* Engineers available to service machinery overseas.

Packing & Delivery

1.by courier, like DHL,UPS,FEDEX,etc.usually,3-4 days to arrive.
2.by air to the air port,usually5-7 days to arrive.
3.by sea to sea port,ususally,15-30 days to arrive.
if you delivery time is very urgent, we suggest you choose by courier or by air.
if it not very urgent,we will suggest you choose by sea,it is very cheap

Our Company

Henan Chengyi Equipment Science an Technology Ltd. is a manufacturer devoted into the research, development and produce of lab furnace and industrial furnace.
In 2009, begin to produce furnaces for university research institutes and military testing departments.
In 2013, establish the project of designing industrial continuous production furnaces.
In 2014, Henan Chengyi Laboratory Equipment Ltd. is established, aiming at the developing and sales of lab furnace.
In 2015, Henan Chengyi Equipment Science and Technology Ltd. is established to develop high technology lab furnace and industrial furnace.
In 2016, Chengyi actively exploring overseas market and got the import & export right. Chengyi Brand is praised by customers all around the world.